| Department of Defence | Advanced Photolithography System | A$1.5M | 2021-11-04 |
| CSIRO | Specialised scientific equipment | A$1.3M | 2022-10-03 |
| Department of Defence | Lithography Equipment System | A$1.3M | 2022-06-07 |
| Department of Defence | Lithographic System | A$1.3M | 2022-05-24 |
| CSIRO | Scientific Equipment | A$890.9K | 2020-09-21 |
| Department of Defence | direct write lithography system | A$271.9K | 2019-01-29 |
| Department of Defence | Laboratory and Scientific Equipment | A$121.0K | 2020-04-15 |
| Department of Defence | Laboratory and Scientific Equipment | A$93.8K | 2021-02-23 |